Christopher A. Dirdal, P. Thrane, F. Dullo, Jesil Jose
{"title":"Metasurface integration into thin-film piezoelectric MEMS: realizations of a tunable waveplate and a tunable lens","authors":"Christopher A. Dirdal, P. Thrane, F. Dullo, Jesil Jose","doi":"10.1117/12.3016912","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":334982,"journal":{"name":"Metamaterials XIV","volume":"45 15","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Metamaterials XIV","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3016912","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}