Laurent Mollard, Christel Dieppedale, Antoine Hamelin, François Gardien, Gwenael Le Rhun, Jean Hue, Laurent Frey, Gael Castellan
{"title":"Thermal Behavior of Biaxial Piezoelectric MEMS Scanner","authors":"Laurent Mollard, Christel Dieppedale, Antoine Hamelin, François Gardien, Gwenael Le Rhun, Jean Hue, Laurent Frey, Gael Castellan","doi":"10.3390/proceedings2024097223","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517679,"journal":{"name":"Eurosensors 2023","volume":"58 3","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Eurosensors 2023","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3390/proceedings2024097223","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}