Optimizing surface treatment for Nb-doped SrTiO3 substrates: effects on structural and chemical properties

IF 0.8 4区 物理与天体物理 Q3 PHYSICS, MULTIDISCIPLINARY
Minjae Son, Karishma Sualiheen, Sangjin Choi, Seung Gyo Jeong, Jong-Seong Bae, Seungyong Eom, Do Hyung Kim, Joonghoe Dho, Bharat Jalan, Dooyong Lee, Kyeong Tae Kang
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Abstract

The use of SrTiO3 substrates with either TiO2- or SrO-terminated surfaces is essential for growing high-quality epitaxial perovskite oxide thin films. Adding niobium to SrTiO3 introduces novel functionalities and imparts alterations to the metallic and structural characteristics. This study thoroughly investigates the physical and chemical processes involved in the chemical etching and annealing processes. This is to achieve an atomically flat, single-terminated surface of (001)-oriented Nb-doped SrTiO3 (Nb:STO) surfaces and to optimize their performance. Atomic force microscopy (AFM) identified the most optimal treatment regimen, pinpointing annealing at 950 °C for a duration of 6 h, coupled with a 90-s etching procedure, which achieves a well-defined step terrace structure of the substrate. Additionally, angle-resolved X-ray photoelectron spectroscopy (AR-XPS) has revealed pronounced shifts in the predominant chemical component within the near-surface region due to changes in thermal parameters, even under consistent temperatures and durations. Reflection high-energy electron diffraction (RHEED) further confirms the creation of a single-terminated surface with the specified annealing conditions. This research provides valuable insights into the surface treatment processes for Nb:STO substrates and their influence on substrates’ structural and chemical properties.

Abstract Image

优化掺铌氧化钛基底的表面处理:对结构和化学特性的影响
使用具有 TiO2 或 SrO 端面的 SrTiO3 基底对于生长高质量的外延包晶氧化物薄膜至关重要。在 SrTiO3 中添加铌可引入新的功能,并改变其金属和结构特性。本研究深入探讨了化学蚀刻和退火过程中涉及的物理和化学过程。其目的是使取向 (001) Nb 掺杂 SrTiO3(Nb:STO)表面达到原子平坦、单端面,并优化其性能。原子力显微镜(AFM)确定了最理想的处理方案,即在 950 ℃ 下退火 6 小时,再加上 90 秒的蚀刻过程,从而使基底形成明确的阶梯梯形结构。此外,角度分辨 X 射线光电子能谱(AR-XPS)显示,即使在温度和持续时间一致的情况下,由于热参数的变化,近表面区域的主要化学成分也发生了明显的变化。反射高能电子衍射 (RHEED) 进一步证实了在特定退火条件下形成的单端表面。这项研究为了解 Nb:STO 衬底的表面处理工艺及其对衬底结构和化学特性的影响提供了宝贵的见解。
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来源期刊
Journal of the Korean Physical Society
Journal of the Korean Physical Society PHYSICS, MULTIDISCIPLINARY-
CiteScore
1.20
自引率
16.70%
发文量
276
审稿时长
5.5 months
期刊介绍: The Journal of the Korean Physical Society (JKPS) covers all fields of physics spanning from statistical physics and condensed matter physics to particle physics. The manuscript to be published in JKPS is required to hold the originality, significance, and recent completeness. The journal is composed of Full paper, Letters, and Brief sections. In addition, featured articles with outstanding results are selected by the Editorial board and introduced in the online version. For emphasis on aspect of international journal, several world-distinguished researchers join the Editorial board. High quality of papers may be express-published when it is recommended or requested.
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