J. Grundmann, Bernd Bodermann, Elena Ermilova, Matthias Weise, Andreas Hertwig, Petr Klapetek, Jila Rafighdoost, Silvania F. Pereira
{"title":"Optical and tactile measurements on SiC sample defects","authors":"J. Grundmann, Bernd Bodermann, Elena Ermilova, Matthias Weise, Andreas Hertwig, Petr Klapetek, Jila Rafighdoost, Silvania F. Pereira","doi":"10.5194/jsss-13-109-2024","DOIUrl":null,"url":null,"abstract":"Abstract. In power electronics, compound semiconductors with large bandgaps, like silicon carbide (SiC), are increasingly being used as material instead of silicon. They have a lot of advantages over silicon but are also intolerant of nanoscale material defects, so that a defect inspection with high accuracy is needed. The different defect types on SiC samples are measured with various measurement methods, including optical and tactile methods. The defect types investigated include carrots, particles, polytype inclusions and threading dislocations, and they are analysed with imaging ellipsometry, coherent Fourier scatterometry (CFS), white light interference microscopy (WLIM) and atomic force microscopy (AFM). These different measurement methods are used to investigate which method is most sensitive for which type of defect to be able to use the measurement methods more effectively. It is important to be able to identify the defects to classify them as critical or non-critical for the functionality of the end product. Once these investigations have been completed, the measurement systems can be optimally distributed to the relevant defects in further work to realize a hybrid analysis of the defects. In addition to the identification and classification of defects, such a future hybrid analysis could also include characterizations, e.g. further evaluation of ellipsometric data by using numerical simulations.\n","PeriodicalId":17167,"journal":{"name":"Journal of Sensors and Sensor Systems","volume":null,"pages":null},"PeriodicalIF":0.8000,"publicationDate":"2024-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Sensors and Sensor Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.5194/jsss-13-109-2024","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
引用次数: 0
Abstract
Abstract. In power electronics, compound semiconductors with large bandgaps, like silicon carbide (SiC), are increasingly being used as material instead of silicon. They have a lot of advantages over silicon but are also intolerant of nanoscale material defects, so that a defect inspection with high accuracy is needed. The different defect types on SiC samples are measured with various measurement methods, including optical and tactile methods. The defect types investigated include carrots, particles, polytype inclusions and threading dislocations, and they are analysed with imaging ellipsometry, coherent Fourier scatterometry (CFS), white light interference microscopy (WLIM) and atomic force microscopy (AFM). These different measurement methods are used to investigate which method is most sensitive for which type of defect to be able to use the measurement methods more effectively. It is important to be able to identify the defects to classify them as critical or non-critical for the functionality of the end product. Once these investigations have been completed, the measurement systems can be optimally distributed to the relevant defects in further work to realize a hybrid analysis of the defects. In addition to the identification and classification of defects, such a future hybrid analysis could also include characterizations, e.g. further evaluation of ellipsometric data by using numerical simulations.
期刊介绍:
Journal of Sensors and Sensor Systems (JSSS) is an international open-access journal dedicated to science, application, and advancement of sensors and sensors as part of measurement systems. The emphasis is on sensor principles and phenomena, measuring systems, sensor technologies, and applications. The goal of JSSS is to provide a platform for scientists and professionals in academia – as well as for developers, engineers, and users – to discuss new developments and advancements in sensors and sensor systems.