A novel dynamic interferometric measurement method based on liquid level reference

IF 3.2 3区工程技术 Q2 ENGINEERING, INDUSTRIAL

Cirp Annals-Manufacturing Technology Pub Date : 2024-01-01 DOI:10.1016/j.cirp.2024.04.070

引用次数: 0

Abstract

Dynamic optical interferometric measurement method directly uses the liquid level as the reference surface, which immerses the tested object in liquid, and the interferograms are generated based on the optical path difference between the surfaces of the liquid and the object. The phase shift is realized by adjusting the incident angle of the laser with a rotation reflector. A generalized inhomogeneous phase shift algorithm is developed to suppress the micro-vibration of the liquid surface by the iterative least squares method combined with a confidence matrix. The high performance of the proposed method has been well verified in simulation and experiment.

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基于液位基准的新型动态干涉测量法

动态光学干涉测量法直接以液面为基准面，将被测物体浸入液体中，根据液体和物体表面的光程差生成干涉图。相移是通过旋转反射镜调整激光的入射角实现的。通过结合置信矩阵的迭代最小二乘法，开发了一种广义不均匀相移算法来抑制液体表面的微振动。所提方法的高性能在模拟和实验中得到了很好的验证。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Cirp Annals-Manufacturing Technology 工程技术-工程：工业

CiteScore

7.50

自引率

9.80%

发文量

137

审稿时长

13.5 months

期刊介绍： CIRP, The International Academy for Production Engineering, was founded in 1951 to promote, by scientific research, the development of all aspects of manufacturing technology covering the optimization, control and management of processes, machines and systems. This biannual ISI cited journal contains approximately 140 refereed technical and keynote papers. Subject areas covered include: Assembly, Cutting, Design, Electro-Physical and Chemical Processes, Forming, Abrasive processes, Surfaces, Machines, Production Systems and Organizations, Precision Engineering and Metrology, Life-Cycle Engineering, Microsystems Technology (MST), Nanotechnology.