Specificity of electrophysical and gas-sensitive properties of nanocomposite ZnO–TiO2 films formed by solid-phase pyrolysis

Victor V. Petrov , Maria G. Volkova , Alexsandra P. Ivanishcheva , Gleb V. Tolstyak , Ekaterina M. Bayan
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Abstract

ZnO–TiO2 thin films containing 0.5 mol%, 1.0 mol%, and 5.0 mol% ZnO were synthesized by oxidative solid-phase pyrolysis. The materials contained anatase and rutile phases with particle size of 6–13 nm, as confirmed using X-ray phase analysis and scanning electron microscopy. When a certain number of ZnO crystallites appeared in the TiO2 film structure in the temperature range of room temperature to 220 °C, a two-level response of the film resistance was observed, differing by approximately 10%, as obtained by electrophysical measurements. The two-level response correlates with the formation of two donor energy levels of 0.28 and 0.33 eV in the band structure of the ZnO–TiO2 films. The donor level with a higher activation energy corresponded to the Ti vacancy (VTi), and that with a lower activation energy corresponded to the Zn vacancy (VZn). Two levels of gas-sensitive properties were noted for 0.5ZnO–TiO2, 1ZnO–TiO2, and 5ZnO–TiO2 under the influence of 50 ppm NO2 at 250 °C. Such two-level responses can be ascribed to the pinning of the Fermi level on ZnO and TiO2 nanocrystallites. The mechanism of the beak-shaped and two-level responses of sensors based on composite nanomaterials when exposed to various gases was elucidated.

固相热解形成的 ZnO-TiO2 纳米复合薄膜的电物理特性和气敏特性的特异性
通过氧化固相热解法合成了氧化锌含量分别为 0.5 摩尔%、1.0 摩尔% 和 5.0 摩尔%的 ZnO-TiO2 薄膜。经 X 射线相分析和扫描电子显微镜确认,这些材料含有粒径为 6-13 纳米的锐钛矿相和金红石相。在室温至 220 ℃ 的温度范围内,当二氧化钛薄膜结构中出现一定数量的氧化锌晶体时,通过电物理测量可观察到薄膜电阻的两级响应,相差约 10%。这种两级响应与 ZnO-TiO2 薄膜能带结构中形成的 0.28 和 0.33 eV 两个供体能级有关。活化能较高的供体能级对应于 Ti 空位(V-Ti),活化能较低的供体能级对应于 Zn 空位(V-Zn)。在 250 °C、50 ppm NO2 的影响下,0.5ZnO-TiO2、1ZnO-TiO2 和 5ZnO-TiO2 均具有两级气敏特性。这种双水平响应可归因于 ZnO 和 TiO2 纳米晶上费米水平的钉扎。阐明了基于复合纳米材料的传感器在暴露于各种气体时产生喙状响应和双电平响应的机理。
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