A dual-range Janus-structure pressure sensor with broad detection range and high resolution combining triboelectricity and piezoelectricity

Abstract

Enabling pressure sensors with high resolution and a broad detection range is of paramount importance yet challenging due to the limitations of each known sensing method. Overlying different sensing mechanisms to achieve complementary functions is a promising approach, but it often leads to increased device thickness, crosstalk signals and complex signal channel management. Herein, we present a dual-functional conformable pressure sensor that adopts a Janus thin film layout, enabling simultaneous piezoelectric and triboelectric signal detection capabilities between just one electrode pair, showing a most compact device configuration. Notably, despite its thin thickness (~80 μm for a packaged device), it exhibits a broad-range detection capability with high signal resolution and fast response time, demonstrating a distinct signal-relay characteristic corresponding to piezoelectricity and triboelectricity. Despite the slimness and simple structure, it shows an impressive signal resolution of 0.93 V·kPa⁻¹ in the range of 0.1–140 kPa and 0.05 V·kPa⁻¹ in the range of 140–380 kPa. Moreover, the device fabrication can be combined with the kirigami method to improve fitting to joint surfaces. This work introduces an innovative paradigm for designing advanced pressure sensing mechanisms, enabling a single device that can meet diverse application scenarios through its simplicity, slim layout, conformable, and self-powered characteristics to adapt to multiple scenarios.