Design and analysis of a symmetric overconstrained compliant tilt/tip stage based on a hybrid transmission ratio model

Abstract

Developing a compliant mechanism that have potential in parasitism suppression and cross-axis decoupling is a major challenge to meet the requirement of spatial micro-/nano positioning. This work introduces a compliant tilt/tip stage design with a symmetric and overconstrained configuration that is equipped with four reverse-bridge-notch-flexure amplifiers(RBNFAs) and five revolute notch flexure hinges as multiaxis decoupled structures. A hybrid transmission ratio model is developed to describe the mechanical behavior of this stage using elastic beam and pseudo-rigid-body theories. Finite element analysis(FEA) confirmed the analytical model results. A comprehensive study is performed based on FEA model to validate the influence of a particular configuration on parasitic motion and decoupling effect. A prototype stage is 3D-printed and experimentally tested, which confirmed the predictions of the analytical hybrid model. Additionally, further analysis was conducted to examine the static mechanical characteristics and parasitic behavior of the stage.