Designs of Optomechanical Acceleration Sensors with the Natural Frequency from 5 Hz to 50 kHz

Designs Pub Date : 2024-04-07 DOI:10.3390/designs8020033
Marina Rezinkina, C. Braxmaier
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Abstract

In many applications, such as space navigation, metrology, testing, and geodesy, it is necessary to measure accelerations with frequencies ranging from fractions of a hertz to several kilohertz. For this purpose, optomechanical sensors are used. The natural frequency of such sensors should be approximately ten times greater than the frequency of the measured acceleration. In the case of triaxial acceleration measurements, a planar design with two sensors that measure accelerations in two perpendicular in-plane directions and a third sensor that measures out-of-plane acceleration is effective. The mechanical characteristics of the existing designs of both in-plane and out-of-plane types of sensors were analyzed, and the improved designs were elaborated. Using numerical simulation, the dependencies of the natural frequency level in the range from several hertz to tens of kilohertz on the designs and geometric parameters of opto-mechanical accelerometers were modeled. This allows one to select the accelerometer design and its parameters to measure the acceleration at the assigned frequency. It is shown that the opto-mechanical accelerometers of the proposed designs have reduced dissipation losses and crosstalk.
设计固有频率为 5 Hz 至 50 kHz 的光机械加速度传感器
在空间导航、计量、测试和大地测量等许多应用中,都需要测量频率从几分之一赫兹到几千赫兹的加速度。为此,需要使用光机械传感器。此类传感器的固有频率应约为所测加速度频率的十倍。在三轴加速度测量中,有效的平面设计是由两个传感器测量两个垂直平面方向的加速度,第三个传感器测量平面外加速度。我们分析了现有平面内和平面外传感器设计的机械特性,并详细阐述了改进设计。通过数值模拟,模拟了从几赫兹到几十千赫兹范围内的固有频率水平对光机械加速度计的设计和几何参数的依赖关系。这样就可以选择加速度计的设计及其参数,以测量指定频率下的加速度。结果表明,拟议设计的光机械加速度计可减少耗散损耗和串扰。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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