{"title":"Ultraprecision machining of aberration-corrected diffractive optics with phase correcting groove trajectories","authors":"Marco Jagodzinski, Stefan Kühne, Dirk Oberschmidt","doi":"10.1117/1.jom.4.2.023501","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"438 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Optical Microsystems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/1.jom.4.2.023501","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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