XPS guide for insulators: Electron flood gun operation and optimization, surface charging, controlled charging, differential charging, useful FWHMs, problems and solutions, and advice
{"title":"XPS guide for insulators: Electron flood gun operation and optimization, surface charging, controlled charging, differential charging, useful FWHMs, problems and solutions, and advice","authors":"B. Vincent Crist","doi":"10.1116/6.0003439","DOIUrl":null,"url":null,"abstract":"Current day x-ray photoelectron spectroscopy (XPS) instrument makers have made significant advances in charge compensation systems over the last 20 years, which makes it easier to analyze insulators, but samples still have many differences in chemistry, dielectric properties, sizes, surface roughness, etc. that force instrument operators to tweak flood gun settings if they want or need to obtain high quality chemical state spectra that provide the most information. This guide teaches which flood gun variables to check, and how to optimize electron flood gun settings by presenting high energy resolution, chemical state spectra that show the result of using a poorly aligned flood gun on modern XPS instruments equipped with a monochromatic aluminum Kalpha x-ray source. This guide is focused on the XPS measurement of insulators—nonconductive metal oxides and polymers. This guide shows that by measuring commonly available polymers (polypropylene and polyethylene terephthalate) or ceramic materials (SiO2 and Al2O3), the operator can easily characterize the good and bad effects of XY position settings and other settings provided by modern electron flood gun systems. This guide includes many original, never-before-published XPS peak full width at half maximum (FWHM) that will greatly assist peak-fitting efforts. This guide reveals a direct correlation between electron count-rate and best charge-control settings. This guide discusses sample and instrument issues that affect surface charging and explains how to check the quality of charge control by measuring the FWHM and binding energy of C (1s) or O (1s) spectra produced from the sample currently being analyzed. A list of other charge-control methods is provided, along with advice and a best-known method. The availability of large extensive databases of actual spectra is extremely beneficial to users who need real-world examples of high quality chemical state spectra to guide their in-house efforts to collect high quality spectra and to interpret valuable information from the peak-fits of those spectra.","PeriodicalId":170900,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"27 8","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-04-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology A","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0003439","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Current day x-ray photoelectron spectroscopy (XPS) instrument makers have made significant advances in charge compensation systems over the last 20 years, which makes it easier to analyze insulators, but samples still have many differences in chemistry, dielectric properties, sizes, surface roughness, etc. that force instrument operators to tweak flood gun settings if they want or need to obtain high quality chemical state spectra that provide the most information. This guide teaches which flood gun variables to check, and how to optimize electron flood gun settings by presenting high energy resolution, chemical state spectra that show the result of using a poorly aligned flood gun on modern XPS instruments equipped with a monochromatic aluminum Kalpha x-ray source. This guide is focused on the XPS measurement of insulators—nonconductive metal oxides and polymers. This guide shows that by measuring commonly available polymers (polypropylene and polyethylene terephthalate) or ceramic materials (SiO2 and Al2O3), the operator can easily characterize the good and bad effects of XY position settings and other settings provided by modern electron flood gun systems. This guide includes many original, never-before-published XPS peak full width at half maximum (FWHM) that will greatly assist peak-fitting efforts. This guide reveals a direct correlation between electron count-rate and best charge-control settings. This guide discusses sample and instrument issues that affect surface charging and explains how to check the quality of charge control by measuring the FWHM and binding energy of C (1s) or O (1s) spectra produced from the sample currently being analyzed. A list of other charge-control methods is provided, along with advice and a best-known method. The availability of large extensive databases of actual spectra is extremely beneficial to users who need real-world examples of high quality chemical state spectra to guide their in-house efforts to collect high quality spectra and to interpret valuable information from the peak-fits of those spectra.