Direct nanosecond laser metallization of AlN ceramics

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2024-04-10 DOI:10.1088/1612-202x/ad3816

A A Sviridova, A S Shchekin, V N Petrovskiy, A A Ivanov, M M Berdnikova

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Abstract

In this paper, a study of the influence of laser processing parameters with pulsed nanosecond laser radiation on the degree of metallization and the quality of the metallized surface of aluminum nitride ceramics is presented. Experiments were carried out to create conductive structures with the lowest resistance using direct laser metallization. The dependences of resistance on duration, pulse overlap, and laser fluence were obtained and analyzed, and changes in surface roughness were considered. In addition, the composition of the surface of laser-metallized ceramics was studied using energy-dispersive x-ray spectroscopy. As a result, it was shown that the resistance is inversely proportional to the square root of the pulse duration, the thermal diffusion length was estimated as l_T = 8.2 μm for 200 ns and l_T = 1.2 μm for 4 ns, and the presence of optimal values of pulse overlap Oy (scanning direction) equal to 50% and pulse overlap Ox (step direction) equal to 96% and 99.7% for pulse durations of 200 and 4 ns, respectively, was determined. The choice of optimal pulse overlaps with the highest laser fluence allowed us to obtain the minimum resistance value with maximum performance.

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纳秒激光直接金属化氮化铝陶瓷

本文研究了脉冲纳秒激光辐射的激光加工参数对氮化铝陶瓷金属化程度和金属化表面质量的影响。实验旨在利用直接激光金属化技术制造出电阻最小的导电结构。获得并分析了电阻与持续时间、脉冲重叠和激光能量的关系，并考虑了表面粗糙度的变化。此外，还利用能量色散 X 射线光谱研究了激光金属化陶瓷表面的成分。结果表明，电阻与脉冲持续时间的平方根成反比，热扩散长度在 200 ns 时估计为 lT = 8.2 μm，在 4 ns 时估计为 lT = 1.2 μm，并确定了在脉冲持续时间为 200 ns 和 4 ns 时，脉冲重叠 Oy（扫描方向）的最佳值为 50%，脉冲重叠 Ox（阶跃方向）的最佳值分别为 96% 和 99.7%。选择具有最高激光能量的最佳脉冲重叠，使我们能够获得具有最高性能的最小电阻值。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.