Hong Cai, Bo Li, Yiding Lin, Haitao Yu, Steven Hou Jang Lee, Chin Khang Tew, Jae Ok Yoo, Charmaine Goh, Shervonne Woon, D. K. T. Ng, Navab Singh, Xianshu Luo, L. Lee
{"title":"Low-loss 800nm-thick PECVD silicon nitride photonic platform on 300-mm wafer","authors":"Hong Cai, Bo Li, Yiding Lin, Haitao Yu, Steven Hou Jang Lee, Chin Khang Tew, Jae Ok Yoo, Charmaine Goh, Shervonne Woon, D. K. T. Ng, Navab Singh, Xianshu Luo, L. Lee","doi":"10.1117/12.3002146","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517870,"journal":{"name":"Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII","volume":"107 s416","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3002146","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}