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Quality factor enhancement of InP nanobeam cavities using atomic layer deposition

Photonic and Phononic Properties of Engineered Nanostructures XIV Pub Date : 2024-03-13 DOI:10.1117/12.3000597
Mohammad Habibur Rahaman, Chang-Min Lee, Mustafa Atabey Buyukkaya, S. Harper, Fariba Islam, E. Waks
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利用原子层沉积提高 InP 纳米束腔的品质因数
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Photonic and Phononic Properties of Engineered Nanostructures XIV
Photonic and Phononic Properties of Engineered Nanostructures XIV
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