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Non-destructive multi-parameter investigation of nanoimprinted structures

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII Pub Date : 2024-03-13 DOI:10.1117/12.2692650
Selina Burkert, Lukas Schwörer, Tim Schubert, David Stein, Andreas Heinrich
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纳米压印结构的非破坏性多参数研究
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Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII
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