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MEMS-on-PIC: a cross-platform approach to combine ultra-low-power MEMS-modulators with photonic integrated circuits

Integrated Optics: Devices, Materials, and Technologies XXVIII Pub Date : 2024-03-13 DOI:10.1117/12.3013649
Martin Blasl, Meysam Namdari, Maximilian Wagner, Jan Grahmann
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MEMS-on-PIC: 将超低功耗 MEMS 调制器与光子集成电路相结合的跨平台方法
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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Integrated Optics: Devices, Materials, and Technologies XXVIII
Integrated Optics: Devices, Materials, and Technologies XXVIII
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