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Basic investigations on laser micromachining with sub 100 fs pulses and an industrial grade laser system

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX Pub Date : 2024-03-13 DOI:10.1117/12.3000155
Beat Neuenschwander, Christian Nussbaum, S. Remund, A. Malki, Christian Franke, Kilian Fritsch, D. Ballukonis, Ulrich Hochner
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使用 100 fs 以下脉冲和工业级激光系统进行激光微加工的基础研究
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX
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