Design and performance analysis of a MEMS Based Area-Variation Capacitive Accelerometer with Readout Circuit

Q4 Engineering

Journal of Integrated Circuits and Systems Pub Date : 2024-03-15 DOI:10.29292/jics.v19i1.749

Mahua Raha Patra, Kalyan Biswas

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Abstract

The structural optimization of the device is used in the present work to demonstrate the improvement of the device sensitivity for a MEMS accelerometer based on capacitive principle due to overlap area change between electrodes. The proof mass of the device is made up of a few parallel fingers those are joined together. Proof mass is supported by flexible mechanical beams that resemble springs is suspended over fixed electrodes and are fastened to the substrate. The greatest displacement that the proof mass can suffer with application of acceleration is determined for the specific construction. The connected beams' width and length were changed, and ANSYS FEA software was used to model the reaction. Sensitivity of the device is analyzed and discussed based on the findings of various device geometry measurements, and suggestions for improving sensitivity are also made. Additionally, a signal conditioning circuit that changes the capacitance to voltage as a result of the proof mass deflecting differently is described. These discoveries might help designers to create capacitive MEMS accelerometers with increased sensitivity.

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带读出电路的基于 MEMS 的面积变化电容式加速度计的设计与性能分析

在本研究中，通过对设备结构的优化，证明了基于电容原理的 MEMS 加速计由于电极间重叠面积的变化而提高了设备灵敏度。该装置的验证质量由几个平行的手指连接而成。试样质量由类似弹簧的柔性机械梁支撑，悬挂在固定电极上，并固定在基板上。根据具体的结构，确定了在施加加速度时验证质量所能承受的最大位移。改变连接梁的宽度和长度，并使用 ANSYS FEA 软件建立反应模型。根据各种装置几何测量的结果，对装置的灵敏度进行了分析和讨论，并提出了提高灵敏度的建议。此外，还介绍了一种信号调节电路，该电路可将电容转换为电压，因为验证质量会发生不同程度的偏转。这些发现可能有助于设计人员设计出灵敏度更高的电容式 MEMS 加速计。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Integrated Circuits and Systems Engineering-Electrical and Electronic Engineering

CiteScore

0.90

自引率

0.00%

发文量

期刊介绍： This journal will present state-of-art papers on Integrated Circuits and Systems. It is an effort of both Brazilian Microelectronics Society - SBMicro and Brazilian Computer Society - SBC to create a new scientific journal covering Process and Materials, Device and Characterization, Design, Test and CAD of Integrated Circuits and Systems. The Journal of Integrated Circuits and Systems is published through Special Issues on subjects to be defined by the Editorial Board. Special issues will publish selected papers from both Brazilian Societies annual conferences, SBCCI - Symposium on Integrated Circuits and Systems and SBMicro - Symposium on Microelectronics Technology and Devices.