Jeongwoon Hwang, Dongwook Kim, Yeonghun Lee, Taesoon Hwang, Jinho Ahn, Kyeongjae Cho
{"title":"Infrared emissivity - resistivity correlation of Ru thin films for EUV pellicle applications","authors":"Jeongwoon Hwang, Dongwook Kim, Yeonghun Lee, Taesoon Hwang, Jinho Ahn, Kyeongjae Cho","doi":"10.1142/s1793292024500206","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":509426,"journal":{"name":"Nano","volume":"8 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nano","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1142/s1793292024500206","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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