Lena Wysocki, Jeong-Yeon Hwang, Patrick Schütt, Paul Raschdorf, Erdem Yarar, Gunnar Wille, S. Gu-Stoppel
{"title":"Biaxial resonant MEMS mirrors with large field of view for LiDAR systems","authors":"Lena Wysocki, Jeong-Yeon Hwang, Patrick Schütt, Paul Raschdorf, Erdem Yarar, Gunnar Wille, S. Gu-Stoppel","doi":"10.1117/12.3002711","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517784,"journal":{"name":"MOEMS and Miniaturized Systems XXIII","volume":"54 2","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"MOEMS and Miniaturized Systems XXIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3002711","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}