{"title":"Modeling and analysis of nonuniform metal-coating of deeply-etched vertical micromirrors","authors":"Hoda A. H. Morshed, Y. Sabry, Diaa Khalil","doi":"10.1117/12.3001562","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517784,"journal":{"name":"MOEMS and Miniaturized Systems XXIII","volume":"647 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"MOEMS and Miniaturized Systems XXIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3001562","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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