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Optimisation of dicing parameters for lithium niobate ridge waveguide fabrication

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII Pub Date : 2024-03-13 DOI:10.1117/12.3003114
Matthew P. D'Souza, Glenn M Churchill, P. Gow, Peter G. R. Smith, C. Gawith, James C. Gates
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优化铌酸锂脊波导制造的切割参数
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Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII
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