{"title":"Application of moiré method for defect detection and strain imaging of silicon single crystals","authors":"Qingcui Huang, Qinghua Wang, Xiaojun Yan","doi":"10.1117/12.3023360","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517198,"journal":{"name":"International Conference on Optical and Photonic Engineering (icOPEN 2023)","volume":"288 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-02-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Optical and Photonic Engineering (icOPEN 2023)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3023360","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}