N. Bae, Nam-Kyun Kim, Haneul Lee, Y. Jang, Seolhye Park, Gon-Ho Kim
{"title":"Observation of the floating sheath distribution on Al2O3 and silicon targets adjacent to a DC biased metal substrate","authors":"N. Bae, Nam-Kyun Kim, Haneul Lee, Y. Jang, Seolhye Park, Gon-Ho Kim","doi":"10.1016/j.cap.2024.01.014","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":502881,"journal":{"name":"Current Applied Physics","volume":"100 2","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Current Applied Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/j.cap.2024.01.014","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}