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Improved machinability of single crystal silicon by applying in-situ laser-vibration hybrid assisted diamond cutting

Journal of Materials Processing Technology Pub Date : 2024-02-01 DOI:10.1016/j.jmatprotec.2024.118343
Jianguo Zhang, Xinhuan Li, Yufang Fu, Yunxiang Zheng, Honglei Mo, Xiao Chen, Junfeng Xiao, Jianfeng Xu
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应用原位激光-振动混合辅助金刚石切割技术提高单晶硅的可加工性
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Journal of Materials Processing Technology
Journal of Materials Processing Technology
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