Highly sensitive flexible capacitive pressure sensor with structured elastomeric dielectric layers

Abstract

Sensitive yet stable, robust yet flexible and accurate yet energy efficient pressure sensors are required for variety of purposes. While a large variety of designs and dielectric materials have been explored for this purpose, there is still need of a flexible pressure sensor that will allow easy scale up and inexpensive fabrication. To this end, we have presented here the design of a flexible capacitive pressure sensor using copper coated paper as flexible electrodes and soft Ecoflex layers decorated with cylindrical micro-pillars as the dielectric. While microscopic construct of the sensor allows its easy manufacturability, softness of the layer imparts sensitivity to it. In contrast to many conventional sensors, this design yields sensitivity as high as ∼5 kPa⁻¹ at pressure <1 kPa and somewhat smaller sensitivity as pressure exceeds 1 kPa. We have varied systematically pillar diameter, skin thickness of dielectric layer and pitch of the pillar array to optimise the design and demonstrate its easy tunability. We have presented a model based on buckling of the pillars to predict the response of the sensor. We have explored also a specific design that minimises the hysteresis.