Yung Ting, Reno Pangestu, Mohammad Yaseen Joo, Chih-Husan Yu
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引用次数: 0
Abstract
A piezoelectric driven micro blower constructed with dual chamber associated with Inlet, Relay, and Outlet three orifices inside is developed. The airflow direction is perpendicular to the vibratio...
期刊介绍:
Integrated Ferroelectrics provides an international, interdisciplinary forum for electronic engineers and physicists as well as process and systems engineers, ceramicists, and chemists who are involved in research, design, development, manufacturing and utilization of integrated ferroelectric devices. Such devices unite ferroelectric films and semiconductor integrated circuit chips. The result is a new family of electronic devices, which combine the unique nonvolatile memory, pyroelectric, piezoelectric, photorefractive, radiation-hard, acoustic and/or dielectric properties of ferroelectric materials with the dynamic memory, logic and/or amplification properties and miniaturization and low-cost advantages of semiconductor i.c. technology.