A normal tracking differential confocal measurement method for multiple geometric parameters of hemispherical shell resonator with a common reference

IF 3.4 3区工程技术 Q1 ENGINEERING, MULTIDISCIPLINARY

Measurement Science and Technology Pub Date : 2024-01-03 DOI:10.1088/1361-6501/ad1a85

Yuhan Liu, Xiaocheng Zhang, Yuan Fu, Yun Wang, Zhuxian Yao, Weiqian Zhao

{"title":"A normal tracking differential confocal measurement method for multiple geometric parameters of hemispherical shell resonator with a common reference","authors":"Yuhan Liu, Xiaocheng Zhang, Yuan Fu, Yun Wang, Zhuxian Yao, Weiqian Zhao","doi":"10.1088/1361-6501/ad1a85","DOIUrl":null,"url":null,"abstract":"\n This paper proposes a normal tracking differential confocal measurement method for the inside and outside surface profiles, shell thickness uniformity, and central asymmetry of inside and outside surfaces of the hemispherical shell resonator (HSR). A differential confocal technique with high-transmittance focusing ability is used to measure a single point on the inside and outside surfaces of the HSR. The normal alignment measurement technique is used to accurately measure the inside and outside surfaces and shell thickness of the HSR with a common reference in one measurement process. The HSR is step-rotated to synchronously collect information on the inside and outside surfaces, and using the differential confocal sensor to measure the different normal-section profiles. The experimental results indicate successful measurement of HSR central asymmetry. The repeated measurement accuracy for the inside and outside surface profiles and thickness uniformity is better than 30 nm.","PeriodicalId":18526,"journal":{"name":"Measurement Science and Technology","volume":"59 3","pages":""},"PeriodicalIF":3.4000,"publicationDate":"2024-01-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Measurement Science and Technology","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1088/1361-6501/ad1a85","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, MULTIDISCIPLINARY","Score":null,"Total":0}

引用次数: 0

Abstract

This paper proposes a normal tracking differential confocal measurement method for the inside and outside surface profiles, shell thickness uniformity, and central asymmetry of inside and outside surfaces of the hemispherical shell resonator (HSR). A differential confocal technique with high-transmittance focusing ability is used to measure a single point on the inside and outside surfaces of the HSR. The normal alignment measurement technique is used to accurately measure the inside and outside surfaces and shell thickness of the HSR with a common reference in one measurement process. The HSR is step-rotated to synchronously collect information on the inside and outside surfaces, and using the differential confocal sensor to measure the different normal-section profiles. The experimental results indicate successful measurement of HSR central asymmetry. The repeated measurement accuracy for the inside and outside surface profiles and thickness uniformity is better than 30 nm.

查看原文本刊更多论文

利用共同基准对半球形壳体谐振器的多个几何参数进行法线跟踪差分共焦测量的方法

本文提出了一种法线跟踪差分共焦测量方法，用于测量半球形壳体谐振器（HSR）内外表面轮廓、壳体厚度均匀性和内外表面中心不对称性。具有高透射聚焦能力的差分共焦技术用于测量 HSR 内外表面的单点。法线对准测量技术用于在一个测量过程中以一个共同参照物精确测量 HSR 的内外表面和外壳厚度。通过步进旋转 HSR 来同步收集内外表面的信息，并使用差分共焦传感器测量不同的法线截面轮廓。实验结果表明，HSR 中心不对称测量成功。内外表面轮廓和厚度均匀性的重复测量精度优于 30 nm。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Measurement Science and Technology 工程技术-工程：综合

CiteScore

4.30

自引率

16.70%

发文量

656

审稿时长

4.9 months

期刊介绍： Measurement Science and Technology publishes articles on new measurement techniques and associated instrumentation. Papers that describe experiments must represent an advance in measurement science or measurement technique rather than the application of established experimental technique. Bearing in mind the multidisciplinary nature of the journal, authors must provide an introduction to their work that makes clear the novelty, significance, broader relevance of their work in a measurement context and relevance to the readership of Measurement Science and Technology. All submitted articles should contain consideration of the uncertainty, precision and/or accuracy of the measurements presented. Subject coverage includes the theory, practice and application of measurement in physics, chemistry, engineering and the environmental and life sciences from inception to commercial exploitation. Publications in the journal should emphasize the novelty of reported methods, characterize them and demonstrate their performance using examples or applications.