Fabrication of high-aspect-ratio metallic microstructures by microelectroforming using silver-coated polydimethylsiloxane molds with controllable wettability

IF 2.4 4区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Micromechanics and Microengineering Pub Date : 2024-01-09 DOI:10.1088/1361-6439/ad1c72

Bo Zhou, Longfei Xie, Tingli Wang, Bo Su, Junhu Meng

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Abstract

Microelectroforming is a specialized electroplating process to prepare functional metallic microstructures. However, the formability of microelectroforming is usually restricted by the limited mass transfer in high-aspect-ratio microcavities of molds. This paper presents a simple and reliable method utilizing silver (Ag)-coated polydimethylsiloxane (PDMS) molds with controllable wettability to enhance the formability of microelectroforming. The surfaces of these molds exhibited reversible water contact angles ranging from 4° to 151° realized through ultraviolet irradiation and heat treatment. The hydrophilicity of the PDMS molds facilitated liquid-phase mass transfer, contributing to the fabrication of complete and defect-free nickel microstructures with high aspect ratios. Subsequently, the hydrophobic PDMS molds reduced the interfacial adhesion between these molds and nickel microstructures, which was beneficial for perfect demolding. Nickel microstructures with an aspect ratio of 10 can be achieved by using the PDMS molds, which significantly enhance the formability of microelectroforming. This method provides a potential method to prepare high-aspect-ratio metallic microstructures.

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使用具有可控润湿性的银涂层聚二甲基硅氧烷模具，通过微电铸制造高宽比金属微结构

微电铸是一种制备功能性金属微结构的专业电镀工艺。然而，微电铸的成型性通常受到模具高宽比微腔中有限传质的限制。本文提出了一种简单可靠的方法，利用具有可控润湿性的银涂层聚二甲基硅氧烷（PDMS）模具来提高微电铸的成型性。通过紫外线照射和热处理，这些模具的表面呈现出从 4° 到 151° 的可逆水接触角。PDMS 模具的亲水性促进了液相传质，有助于制造出完整无缺陷的高纵横比镍微结构。随后，疏水性 PDMS 模具降低了这些模具与镍微结构之间的界面粘附力，有利于完美脱模。使用 PDMS 模具可以获得纵横比为 10 的镍微结构，从而显著提高了微电铸的成型性。这种方法为制备高纵横比金属微结构提供了一种潜在的方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Micromechanics and Microengineering 工程技术-材料科学：综合

CiteScore

4.50

自引率

4.30%

发文量

136

审稿时长

2.8 months

期刊介绍： Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data. The journal is focussed on all aspects of: -nano- and micro- mechanical systems -nano- and micro- electomechanical systems -nano- and micro- electrical and mechatronic systems -nano- and micro- engineering -nano- and micro- scale science Please note that we do not publish materials papers with no obvious application or link to nano- or micro-engineering. Below are some examples of the topics that are included within the scope of the journal: -MEMS and NEMS: Including sensors, optical MEMS/NEMS, RF MEMS/NEMS, etc. -Fabrication techniques and manufacturing: Including micromachining, etching, lithography, deposition, patterning, self-assembly, 3d printing, inkjet printing. -Packaging and Integration technologies. -Materials, testing, and reliability. -Micro- and nano-fluidics: Including optofluidics, acoustofluidics, droplets, microreactors, organ-on-a-chip. -Lab-on-a-chip and micro- and nano-total analysis systems. -Biomedical systems and devices: Including bio MEMS, biosensors, assays, organ-on-a-chip, drug delivery, cells, biointerfaces. -Energy and power: Including power MEMS/NEMS, energy harvesters, actuators, microbatteries. -Electronics: Including flexible electronics, wearable electronics, interface electronics. -Optical systems. -Robotics.