A study on passivation improvement in n-passivated emitter rear totally diffused solar cell using rapid thermal annealing

IF 4 4区环境科学与生态学 Q2 ENVIRONMENTAL STUDIES

Energy & Environment Pub Date : 2023-09-01 DOI:10.1177/0958305X221091541

V. Sharma, H. Dhasmana, A. Verma, Avshish Kumar, C.V. Kannan, Yash Pal, Shivangi Jha, V. Jain

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Abstract

An investigation on enhanced surface passivation in the existing industrial process line of large area n-type silicon (Si) Passivated Emitter Rear Totally diffused (n- PERT) solar cell has been performed. The Rapid Thermal Process (RTP) optimization for 20 min is conducted in the temperature range of 500–900°C and device evaluation is carried out with respect to regularly processed n-PERT solar cell. The impact of pre-metallization annealing is studied with the support of cell parameters like shunt resistance, reverse saturation current density determined from current-voltage measurements. The enhanced surface passivation via hydrogenation from silicon nitride (SiNx) layer during annealing is established with the help of external quantum efficiency, spectral response measurements and Fourier transform infrared spectroscopy analysis. The addition of optimized annealing resulted in improvement by 550% (from 38 to 247 µs), 7.73% (from 630.7 to 678.8 mV) and 84.77% (from 223.3 to 34 cm/s) in effective minority carrier lifetime, implied open circuit voltage and surface recombination velocity respectively. Finally, RTP technique for optimized process line has been successfully incorporated in industrial high-volume batch of 140898 CZ n-type Si wafers, which predicts conceptual validation of the study in mass scale production line with an increment in average efficiency of the device by 0.35%.

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利用快速热退火改善 n-passivated 发射极后部完全扩散太阳能电池钝化效果的研究

对大面积 n 型硅(Si)钝化发射极后部完全扩散（n- PERT）太阳能电池现有工业生产线中的增强型表面钝化进行了研究。在 500-900°C 的温度范围内进行了 20 分钟的快速热处理 (RTP) 优化，并对常规处理的 n-PERT 太阳能电池进行了器件评估。研究了预金属化退火对电池参数的影响，如并联电阻、通过电流-电压测量确定的反向饱和电流密度。通过外部量子效率、光谱响应测量和傅里叶变换红外光谱分析，确定了退火过程中氮化硅（SiNx）层的氢化增强了表面钝化。加入优化退火后，有效少数载流子寿命、隐含开路电压和表面重组速度分别提高了 550%（从 38 微秒提高到 247 微秒）、7.73%（从 630.7 毫伏提高到 678.8 毫伏）和 84.77%（从 223.3 厘米/秒提高到 34 厘米/秒）。最后，用于优化工艺线的 RTP 技术已成功应用于 140898 CZ n 型硅片的工业大批量生产，这预示着该研究在大规模生产线上得到了概念验证，器件的平均效率提高了 0.35%。

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来源期刊

Energy & Environment ENVIRONMENTAL STUDIES-

CiteScore

7.60

自引率

7.10%

发文量

157

期刊介绍： Energy & Environment is an interdisciplinary journal inviting energy policy analysts, natural scientists and engineers, as well as lawyers and economists to contribute to mutual understanding and learning, believing that better communication between experts will enhance the quality of policy, advance social well-being and help to reduce conflict. The journal encourages dialogue between the social sciences as energy demand and supply are observed and analysed with reference to politics of policy-making and implementation. The rapidly evolving social and environmental impacts of energy supply, transport, production and use at all levels require contribution from many disciplines if policy is to be effective. In particular E & E invite contributions from the study of policy delivery, ultimately more important than policy formation. The geopolitics of energy are also important, as are the impacts of environmental regulations and advancing technologies on national and local politics, and even global energy politics. Energy & Environment is a forum for constructive, professional information sharing, as well as debate across disciplines and professions, including the financial sector. Mathematical articles are outside the scope of Energy & Environment. The broader policy implications of submitted research should be addressed and environmental implications, not just emission quantities, be discussed with reference to scientific assumptions. This applies especially to technical papers based on arguments suggested by other disciplines, funding bodies or directly by policy-makers.