Polarization-independent double-layer transmission two-dimensional slanted grating under normal incidence

Abstract

This paper proposed a transmission two-dimensional (2D) slanted grating based on a double-layer cylindrical structure. We used rigorous coupled-wave analysis (RCWA) and simulated annealing algorithm (SA) to optimize the grating parameters. Results show that the diffraction efficiency of the (-1,0) and (0,-1) order exceed 35% under normal incidence in the range of 429–468 nm wavelength for TE and TM polarization. Meanwhile, the total diffraction efficiency can reach up to 78%. We also discuss the tolerances for the grating parameters to ensure high quality manufacturing processes. The relatively large tolerances ensure fabrication of the two-dimensional slanted grating and provides the possibility for practical applications. The proposed 2D slanted grating can be applied to 2D exit pupil expansion, which is of great importance in AR/VR applications.