Codes coupling optimization for absolute measurement

Abstract

Absolute measurement has always been one of the important development directions of precision measurement, there are problems that the diffraction and mask working parameters are not considered in the positioning pulse analysis of the absolute code mask at present. Therefore, in order to solve the coupling optimal performance problem of absolute positioning code in actual work, an absolute code should be designed for working in the best parameter-model. In this paper, a multi-parameter model of absolute code working status is established, and the influence of working parameters on its positioning performance is analyzed respectively. The analysis shows that the distance and the angle between the mask and the grating, and the width of the unit code will affect the positioning accuracy. The three parameters restrict each other, and there is a coupling optimal solution. The optimal working state can be obtained through parameter analysis, so as to provide the design and installation parameter guidance of mask. The proposed research can help the practical application of absolute positioning measurement.