Wavefront reconstruction for double-grating Ronchi lateral shearing interferometry with nonlinear optimization

Runzhou Shi, Huiwen Liu, Yuqi Shao, Jian Bai
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引用次数: 0

Abstract

Traditional phase retrieval methods for Ronchi lateral shearing interferometry eliminate the impact of high diffraction orders by increasing the number of phase-shifting interferograms, however, this introduces additional error in the phase-shifting process. We propose an optimization method combining a 2-frame phase-shifting algorithm to achieve accurate wavefront reconstruction. A numerical model matching the physical model is constructed and the cross-iterative gradient descent method is used to optimize the initial results obtained by the two-step phase-shifting method. The accuracy and robustness of the method are verified by simulations and experiments. The proposed method has the advantages of achieving high-precision wavefront reconstruction and correcting the phase-shifting errors, and it significantly simplifies the process of phase shift.
利用非线性优化技术重建双光栅朗奇横向剪切干涉仪的波面
传统的罗氏侧向剪切干涉测量相位检索方法通过增加移相干涉图的数量来消除高衍射阶数的影响,但这会在移相过程中引入额外的误差。我们提出了一种结合 2 帧移相算法的优化方法,以实现精确的波前重建。我们构建了一个与物理模型相匹配的数值模型,并使用交叉迭代梯度下降法对两步移相法获得的初始结果进行优化。模拟和实验验证了该方法的准确性和鲁棒性。所提出的方法具有实现高精度波前重建和校正移相误差的优点,并且大大简化了移相过程。
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