Highly Sensitive and Selective MEMS Gas Sensor Based on WO3/Al2O3/Graphite for 2-Chloroethyl Ethyl Sulfide (2-CEES) Detection

IF 3.7 3区工程技术 Q2 CHEMISTRY, ANALYTICAL

Chemosensors Pub Date : 2023-12-30 DOI:10.3390/chemosensors12010005

Liang Yang, Wangze Cheng, Wenlong Yan, Li Wen, Changyue Xia, Chuang Sun, Doumeng Hu, Yunong Zhao, Xiaohui Guo, Wei Zeng, Siliang Wang

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Abstract

The detection and monitoring of toxic and harmful gases play a vital role in environmental protection, human health, and industrial and agricultural production. However, it is still challenging to develop gas sensors for the detection of toxic and harmful gases with high sensitivity, good recovery and excellent selectivity. In this study, WO3/Al2O3/graphite composite materials were used for an MEMS 2-CEES gas sensor (dichlorodiethyl sulfide simulation), and the corresponding sensing properties were explored. The experimental results show that when the working temperature is 340 °C, the response of the sensor to 2-CEES gas with a concentration of 5.70 ppm is 69%, the response time is 5 s and the recovery time is 42 s. The sensor also has the advantages of long-term stability and high selectivity. Furthermore, the MEMS gas sensor array based on WO3/Al2O3/graphite composite materials has been achieved and also exhibits excellent sensing performance. Overall, this study provides a strategy for realizing high-performance dichlorodiethyl sulfide gas sensors.

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基于 WO3/Al2O3/Graphite 的高灵敏度和选择性 MEMS 气体传感器用于检测 2-CEES

有毒有害气体的检测和监控在环境保护、人类健康以及工农业生产中发挥着至关重要的作用。然而，开发灵敏度高、回收率高、选择性好的有毒有害气体检测气体传感器仍是一项挑战。本研究将 WO3/Al2O3/ 石墨复合材料用于 MEMS 2-CEES 气体传感器（模拟二氯二乙基硫醚），并探讨了相应的传感特性。实验结果表明，当工作温度为 340 ℃ 时，传感器对浓度为 5.70 ppm 的 2-CEES 气体的响应率为 69%，响应时间为 5 s，恢复时间为 42 s。此外，基于 WO3/Al2O3/ 石墨复合材料的 MEMS 气体传感器阵列也已实现，并表现出优异的传感性能。总之，本研究为实现高性能二氯二乙基硫醚气体传感器提供了一种策略。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Chemosensors Chemistry-Analytical Chemistry

CiteScore

5.00

自引率

9.50%

发文量

450

审稿时长

11 weeks

期刊介绍： Chemosensors (ISSN 2227-9040; CODEN: CHEMO9) is an international, scientific, open access journal on the science and technology of chemical sensors published quarterly online by MDPI.The journal is indexed in Scopus, SCIE (Web of Science), CAPlus / SciFinder, Inspec, Engineering Village and other databases.