Novel wet transfer technology of manufacturing flexible suspended two-dimensional material devices

Yingtao Wang, Mona Savalia, Xian Zhang
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Abstract

With the rise of two-dimensional (2D) materials, their excellent optical, electronic, and thermal properties different from bulk materials make them increasingly widely studied and commercialized. 2D materials’ exceptional physical properties and unique structures make them an ideal candidate for next-generation flexible and wearable devices. In this work, we created a manufacturing method to successfully transfer monolayer, bilayer, and trilayer graphene onto the flexible substrate, with trenches of micron size to suspend graphene. Thermal transport measurements have been characterized to prove the suspended region. The achievement of manufacturing 2D materials in suspended condition will allow us to study their intrinsic physical properties at a mechanical strain, as well as contribute to novel flexible and wearable electronic devices and sensors.
制造柔性悬浮二维材料装置的新型湿法转移技术
随着二维(2D)材料的兴起,其不同于块状材料的优异光学、电子和热学特性使其得到越来越广泛的研究和商业化。二维材料优异的物理特性和独特的结构使其成为下一代柔性可穿戴设备的理想候选材料。在这项工作中,我们创造了一种制造方法,成功地将单层、双层和三层石墨烯转移到柔性基底上,并在基底上开出微米大小的沟槽来悬浮石墨烯。热传输测量结果证明了悬浮区域的特性。在悬浮状态下制造二维材料的成果将使我们能够研究其在机械应变下的内在物理性质,并为新型柔性可穿戴电子设备和传感器做出贡献。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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