Modeling electrostatically actuated MEMS cantilever beam

IF 2.1 4区物理与天体物理 Q2 PHYSICS, MULTIDISCIPLINARY

Romanian Reports in Physics Pub Date : 2023-12-15 DOI:10.59277/romrepphys.2023.75.913

Cayuss A. Mihaitoaia, Andreea S. Goia, T. O. Cheche

引用次数: 0

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静电致动 MEMS 悬臂梁建模

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Romanian Reports in Physics 物理-物理：综合

CiteScore

4.20

自引率

29.60%

发文量

审稿时长

4-8 weeks

期刊介绍： Romanian Reports in Physics is a journal publishing physics contributions in the fields of: 1. Mathematical and General Physics 2. Nuclear Physics. Particle Physics. Astroparticle Physics 3. Atomic and Molecular Physics 4. Plasma Physics 5. Condensed Matter 6. Optics & Quantum Electronics 7. Biophysics & Medical Physics. Environmental Physics 8. Physical Methods and Instrumentation 9. Earth Physics