High power pulsed magnetron sputtering tailored low temperature CrAlN + MoWS coatings for dry tribological contacts

K. Bobzin, C. Kalscheuer, M. Möbius, C. Schulze, M. Miranda Marti
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Abstract

Gears are used in a variety of applications, for example, in automotive and aerospace industries. In these applications, gears are exposed to harsh conditions such as high Hertzian pressures. In many cases, lubricants are used to achieve a reduction in the coefficient of friction and, thus, in the wear of the components. Nevertheless, in some applications, the use of a lubricant is difficult, for example, in vacuum environments. One promising approach is the application of solid lubricants by using triboactive elements. The present study shows the potential of a process combining high power pulsed magnetron sputtering (HPPMS) and direct current magnetron sputtering (dcMS) for the deposition of CrAlN + MoWS coatings. In HPPMS/dcMS processes, especially, the share of HPPMS leads to higher ionization of the coating plasma and, therefore, to higher coating thicknesses on the teeth of gears. One major challenge in coating processes is the adjustment of the deposition temperature, since steels used for gear applications are temperature sensitive. Therefore, starting from an established coating process with a high coating temperature, the coating process was adjusted by reducing the number of used cathodes. By reducing the count of used dcMS cathodes, the share of HPPMS cathodes within the coating process was increased. Furthermore, segments of gears were coated in order to determine the coating thickness at different distances from the head of the gear tooth. A sufficient coating thickness distribution on the flank of the gear tooth is crucial for friction reduction and wear protection when used in gearboxes. The reduction of used cathodes led to a decrease in the coating temperature from a maximum coating temperature of Tmax = 281 °C to Tmax = 214 and 197 °C. It was shown by nanoindentation measurements that the effect of soft annealing was eliminated by reducing the coating temperature. At the same time, coatings deposited with increased HPPMS fraction led to a reduced coefficient of friction as well as lower wear volumes for pin-on-disk measurements in a dry tribological contact with an uncoated 100Cr6 counterpart. Moreover, these processes exhibited a good coatability of the gear tooth with a relatively high coating thickness even near the gear tooth root. The present study shows the potential of increasing the share of HPPMS during the deposition of coatings for dry-running applications. By increasing the HPPMS content, the tribological behavior as well as the coating thickness distribution on gears can be significantly improved.
高功率脉冲磁控溅射定制的用于干摩擦接触的低温 CrAlN + MoWS 涂层
齿轮有多种用途,例如汽车和航空航天工业。在这些应用中,齿轮暴露在苛刻的条件下,例如高赫兹压力。在许多情况下,使用润滑剂可以降低摩擦系数,从而减少部件的磨损。然而,在某些应用中,例如在真空环境中,很难使用润滑剂。一种很有前景的方法是通过使用三活性元素来应用固体润滑剂。本研究显示了结合高功率脉冲磁控溅射(HPPMS)和直流磁控溅射(dcMS)工艺沉积 CrAlN + MoWS 涂层的潜力。特别是在 HPPMS/dcMS 工艺中,HPPMS 的使用可提高涂层等离子体的电离度,从而提高齿轮齿上的涂层厚度。涂层工艺的一大挑战是如何调整沉积温度,因为齿轮用钢对温度非常敏感。因此,从已建立的涂层温度较高的涂层工艺开始,通过减少使用的阴极数量来调整涂层工艺。通过减少使用的 dcMS 阴极数量,增加了 HPPMS 阴极在涂层工艺中的比例。此外,还对齿轮进行了分段镀膜,以确定与齿轮齿头不同距离处的镀膜厚度。在齿轮箱中使用时,齿轮齿面足够的涂层厚度分布对于减少摩擦和保护磨损至关重要。减少使用阴极导致涂层温度降低,从最高涂层温度 Tmax = 281 °C 降至 Tmax = 214 和 197 °C。纳米压痕测量表明,降低涂层温度消除了软退火的影响。同时,在与未涂层的 100Cr6 对应材料进行干摩擦学接触的针对盘测量中,增加 HPPMS 分数沉积的涂层可降低摩擦系数和磨损量。此外,这些工艺还表现出良好的齿轮齿面涂层性能,即使在齿轮齿根附近也有相对较高的涂层厚度。本研究表明,在干磨应用的涂层沉积过程中,增加 HPPMS 的比例很有潜力。通过增加 HPPMS 的含量,可以显著改善齿轮的摩擦学特性和涂层厚度分布。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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