3D finite element simulation of scratch testing to quantify experimental failure mechanisms of a thin film

IF 1.9 4区材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY

Modelling and Simulation in Materials Science and Engineering Pub Date : 2023-11-24 DOI:10.1088/1361-651x/ad0ce1

José R Pérez-Higareda, Uriel Jirón-Lazos, Zeuz Montiel-González, Dalia A Mazón-Montijo, Andrés M Garay-Tapia, David Torres-Torres

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引用次数: 0

Abstract

In this work, an exhaustive finite element (FE) simulation was developed to closely reproduce experimental parameters such as normal force, tangential force, and penetration depth along the whole scratch test. We used an 800 nm thick Ti–Al–N thin film deposited by sputtering as the reference sample to carry out scratch tests identifying the appearance of failure mechanisms at different longitudinal displacements and critical loads. The hardening models of thin film and substrate allowed us to quantify the maximum principal stresses responsible for thin film spallation, about 14.5 GPa for the tensile mode and −1.49 GPa for the compression mode. These parameters provided an improved perspective to characterize the failure mechanisms on the sample during the scratching. The present enhanced 3D FE simulation can be a crucial tool for designing film-substrate systems with more precise mechanical strength calculations.

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三维有限元模拟划痕测试，量化薄膜的实验失效机制

在这项工作中，我们开发了一种详尽的有限元（FE）模拟，以密切再现整个划痕测试过程中的法向力、切向力和穿透深度等实验参数。我们使用通过溅射沉积的 800 nm 厚 Ti-Al-N 薄膜作为参考样品，进行划痕测试，以确定在不同纵向位移和临界载荷下出现的破坏机制。薄膜和基底的硬化模型使我们能够量化导致薄膜剥落的最大主应力，拉伸模式约为 14.5 GPa，压缩模式约为-1.49 GPa。这些参数为描述划痕过程中样品的破坏机制提供了一个更好的视角。本增强型三维 FE 仿真可作为设计薄膜-基底系统的重要工具，提供更精确的机械强度计算。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Modelling and Simulation in Materials Science and Engineering 工程技术-材料科学：综合

CiteScore

3.30

自引率

5.60%

发文量

审稿时长

1.7 months

期刊介绍： Serving the multidisciplinary materials community, the journal aims to publish new research work that advances the understanding and prediction of material behaviour at scales from atomistic to macroscopic through modelling and simulation. Subject coverage: Modelling and/or simulation across materials science that emphasizes fundamental materials issues advancing the understanding and prediction of material behaviour. Interdisciplinary research that tackles challenging and complex materials problems where the governing phenomena may span different scales of materials behaviour, with an emphasis on the development of quantitative approaches to explain and predict experimental observations. Material processing that advances the fundamental materials science and engineering underpinning the connection between processing and properties. Covering all classes of materials, and mechanical, microstructural, electronic, chemical, biological, and optical properties.