Thermal modeling of hybrid three-dimensional integrated, ring-based silicon photonic–electronic transceivers

David Coenen, Minkyu Kim, H. Oprins, Y. Ban, Dimitrios Velenis, J. Van Campenhout, Ingrid De Wolf
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Abstract

. Co-packaged optics for high performance computing or other data center applications requires dense integration of silicon photonic integrated circuits (PICs) with electronic integrated circuits (EICs). This work discusses the impact of three-dimensional (3D) hybrid integration on the thermal performance of Si ring-based photonic devices in wavelength-division multiplexing PICs. A thermal finite element model of the EIC-PIC assembly is developed and calibrated with thermo-optic device measurements, before and after integration of an electrical driver on top of the PIC by means of microbump flip-chip bonding. Both measurements and simulations of the thermal tuning efficiency and crosstalk between silicon photonic devices show that the EIC can have a significant impact on the thermal performance of the integrated heaters in the PIC by acting as an undesired heat spreader. This heat spreading lowers the heater efficiency with 43.3% and increases the thermal crosstalk between the devices by up to 44.4% compared with a PIC-only case. Finally, it is shown that these negative thermal effects of 3D integration can largely be mitigated by a thermally aware design of the microbump array and the back-end-of-line interconnect, guided by the calibrated thermal simulation model.
混合三维集成环形硅光子电子收发器的热建模
。用于高性能计算或其他数据中心应用的共封装光学器件需要硅光子集成电路(PICs)与电子集成电路(EICs)的密集集成。本文讨论了三维(3D)混合集成对波分复用光子集成电路中硅环光子器件热性能的影响。开发了EIC-PIC组件的热有限元模型,并使用热光学器件测量对其进行了校准,在PIC顶部通过微碰撞倒装键合集成电驱动器之前和之后。对硅光子器件之间的热调谐效率和串扰的测量和模拟表明,EIC可以作为一个不希望的散热器,对PIC中集成加热器的热性能产生重大影响。与仅使用pic的情况相比,这种热扩散使加热器效率降低43.3%,并使器件之间的热串扰增加44.4%。最后,研究表明,在校准的热模拟模型的指导下,通过对微碰撞阵列和后端线互连进行热感知设计,可以在很大程度上减轻3D集成的这些负面热效应。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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