The case for low voltage high resolution scanning electron microscopy of biological samples.

Scanning microscopy. Supplement Pub Date : 1989-01-01
J B Pawley, S L Erlandsen
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Abstract

Dried biological samples are low in scattering power, non-conducting and sensitive to radiation damage. These facts complicate the choice of the optimum beam voltage Vo at which they should be observed in the scanning electron microscope (SEM) because they add as variables the type and thickness of the coating material and degradation/contamination of the specimen by the beam. Heretofore, high resolution SEM could only be carried out at relatively high Vo (20-30kV) because available equipment could not produce small beam diameters at low Vo. Modern instruments can produce beam diameters of about 3nm at 1.5kV. As normal preparative procedures (fixation, critical point drying, coating) are unlikely to preserve reliable structure below this level, it is now possible to investigate the possible advantages associated with low Vo operation such as a reduction in charging and radiation damage and improved topographic contrast. The conclusion recommended by this paper is that the term resolution needs careful definition. The size of the smallest features visible in a micrograph is a function of many variables. Although probably the most important is specimen preparation, a number of others (probe size, beam penetration range, contamination, coating thickness needed to provide contrast and avoid charging etc) are functions of Vo. Of these variables at least probe size and possibly contamination become more favorable at higher Vo while the remainder favor low Vo. As a result the optimum will occur at a Vo where the best balance of these factors occurs for a particular sample. When using the Hitachi S-900, we have found that the optimum seems to be at 1.5-2.5kV for topologically diverse samples, but may extend to 5kV on samples on which very small structural details have been preserved and which are relatively stable to radiation damage.

用低电压高分辨率扫描电子显微镜观察生物样品。
干燥后的生物样品散射功率低,不导电,对辐射损伤敏感。这些事实使在扫描电子显微镜(SEM)中观察到的最佳光束电压Vo的选择复杂化,因为它们添加了涂层材料的类型和厚度以及光束对样品的降解/污染的变量。在此之前,由于现有设备无法在低Vo条件下产生小波束直径,高分辨率SEM只能在相对较高的Vo (20-30kV)下进行。现代仪器可以在1.5kV下产生直径约3nm的光束。由于正常的制备程序(固定、临界点干燥、涂层)不太可能在这一水平以下保持可靠的结构,现在可以研究低Vo操作的可能优势,例如减少充电和辐射损伤以及改善地形对比度。本文建议的结论是,术语分辨率需要仔细定义。在显微照片中可见的最小特征的大小是许多变量的函数。虽然可能最重要的是样品制备,但许多其他因素(探针尺寸,光束穿透范围,污染,提供对比度和避免充电所需的涂层厚度等)都是Vo的功能。在这些变量中,至少探针尺寸和可能的污染在高Vo时变得更有利,而其余的则有利于低Vo。因此,最佳值将出现在Vo处,其中这些因素的最佳平衡发生在特定样品中。当使用日立S-900时,我们发现对于拓扑结构不同的样品,最佳电压似乎是1.5-2.5kV,但对于保留了非常小的结构细节并且相对稳定的辐射损伤的样品,可能会扩展到5kV。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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