Depositing Layers of Nano Graphene on P-Type Silicon Substrate and Studying the Structural and Optical Properties

Marwan Muneam Jasim, Shareef Faiq Sultan Al-Tikrity
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Abstract

The present study involved the deposition of graphene films onto a silicon substrate of p-type using the Pulsed Laser Deposition (PLD) technique by varying the number of laser pulses (700, 600, and 500 pulses) at a fixed energy of 800 mj and a frequency of 6 Hz. The thickness of the prepared samples was calculated, revealing a significant increase in thickness (from 282 to 223 nm) attributed to the accumulation of material with increasing number of pulses. X-ray diffraction (XRD) patterns of graphene samples showed an increase in both the degree of crystallinity and the intensity of the graphene peak with increasing number of pulses leading to an initial boost in crystalline growth. The utilization of (SEM) images, particularly in samples created with 700 pulses, they appear to be more extended and smoother, forming wavy surfaces. Furthermore, a discernible augmentation in the quantity of graphene atomic layers was seen from 80 to 116 in samples that underwent an increase in the number of pulses from 500 to 700. The observation revealed a distinct arrangement of the surface, where, these layers effectively covered the surface with a thickness measuring 115 nm. Furthermore, a noticeable variation in the surface morphology of the deposited samples was also observed with increasing number of pulses. FTIR spectra exhibited a conspicuous augmentation in the intensity of bands, particularly for the asymmetric and symmetric vibrations of the CH2 group, which manifest at wavenumbers of 2940 and 2890 cm-1, respectively, concomitant with an escalation in the number of laser pulses employed during the deposition procedure.
p型硅衬底上纳米石墨烯的沉积及其结构和光学性能研究
本研究采用脉冲激光沉积(PLD)技术,在固定能量为800 mj、频率为6 Hz的条件下,通过改变激光脉冲(700、600和500脉冲)的数量,将石墨烯薄膜沉积在p型硅衬底上。对制备样品的厚度进行了计算,发现随着脉冲次数的增加,材料的厚度显著增加(从282 nm增加到223 nm)。石墨烯样品的x射线衍射(XRD)图谱显示,随着脉冲次数的增加,石墨烯的结晶度和峰值强度都有所增加,从而导致晶体生长的初始增强。利用(SEM)图像,特别是在700脉冲创建的样品中,它们看起来更延伸和光滑,形成波浪状表面。此外,在脉冲次数从500次增加到700次的样品中,石墨烯原子层的数量从80层增加到116层。观察结果显示了一个独特的表面排列,其中,这些层有效地覆盖了表面,厚度为115纳米。此外,随着脉冲次数的增加,沉积样品的表面形貌也发生了明显的变化。FTIR光谱显示出波段强度的显著增强,特别是CH2基团的不对称和对称振动,其波数分别为2940和2890 cm-1,同时在沉积过程中使用的激光脉冲数也在增加。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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