Simulation of laser induced discharge plasma and its extreme ultraviolet radiation

Abstract

Laser induced discharge plasma is one of the important technical means for extreme ultraviolet light source. In this paper, a radiation magneto-hydrodynamic model based on a global equation of state model, an atomic structure calculation model and a collision radiation model is proposed to simulate the dynamic characteristics of laser induced discharge plasma and its extreme ultraviolet radiation characteristics. The simulation reproduced the pinch phenomenon during the discharge process, and the conversion efficiency of extreme ultraviolet light obtained was consistent with the experiment result.