DEPOSITION OF TEXTURED CONDENSATES OF TUNGSTEN BY HYDROGEN REDUCTION OF ITS HEXAFLUORIDE

Abstract

In this work, a study of textured tungsten coatings deposited by the hydrogen reduction of tungsten hexafluoride was carried out. The formation of condensate is carried out by the natural selection of columnar grains growing perpendicular to the surface of deposition. Depending on the oversaturation of the gas phase above the growing solid one, some planes of the pyramids are subjected to a predominant growth rate, which leads to the formation of a texture. In the range of parameters studied, (100) and (111) tungsten textures are formed. The measured surface roughness is within the 5 class.