FIRST PROTOTYPE OF A LOW-COST VACUUM BAFFLE WITH ELECTRICAL FEEDTHROUGH

IF 0.1 Q4 PHYSICS, MULTIDISCIPLINARY
J.M. Conde Garrido, M.A. Couselo, J.M. Silveyra
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引用次数: 0

Abstract

n a previous work, Conde Garrido and Silveyra proposed a novel cold trap (baffle) technology capable of trapping contaminants in vacuum systems. The baffle was designed to be applied in systems to synthesize chalcogenide glass thin films by pulsed laser deposition. While traditional baffles are cooled down with compression cooling systems or cooling solutions such as liquid nitrogen, the reported baffle is cooled down by the thermoelectric effect, which allows for reducing the capital investment, operating costs, as well as start-up and maintenance times. This paper presents the construction, tuning, and characterization of the first physical prototype of the baffle. The characterization included, first, the control of the final pressure reached by the device. To characterize the thermal performance of the baffle, a temperature measurement system was designed and manufactured. Within this measurement system, we highlight a low-cost electric vacuum feedthrough. The results indicate that the constructed baffle can reach pressures lower than 2×10−5mbar, while the cold surfaces reach temperatures of approximately−12◦C. The vacuum and cold temperature levels meet the required conditions for the pulsed laser deposition of chalcogenide glass thin films. However, temperatures are not as low as those estimatedfor the virtual prototype (down to−50◦C). Thermal bridges and resistances present in the fabricated device, neglected in the model, were then identified, pointing out opportunities for improvement. Finally, revisions to the current design are proposed that simplify its manufacturing process, improve its robustness and efficiency, and facilitate its operation and maintenance.
第一个带有电馈通的低成本真空挡板的原型
在之前的工作中,Conde Garrido和Silveyra提出了一种新的冷阱(挡板)技术,能够在真空系统中捕获污染物。设计了用于脉冲激光沉积法制备硫系玻璃薄膜的挡板。传统的折流板是通过压缩冷却系统或液氮等冷却解决方案冷却的,而该折流板是通过热电效应冷却的,这可以减少资本投资、运营成本以及启动和维护时间。本文介绍了结构,调谐,和表征的第一个物理原型的挡板。表征包括,首先,控制装置达到的最终压力。为了表征隔板的热性能,设计并制造了一套温度测量系统。在这个测量系统中,我们强调了一个低成本的电真空馈通。结果表明,构建的挡板可以达到低于2×10 - 5mbar的压力,而冷表面达到约- 12◦C的温度。真空温度和冷温度水平均满足脉冲激光沉积硫系玻璃薄膜的条件。然而,温度并不像那些估计的虚拟样机(低至- 50◦C)。然后确定了模型中忽略的制造器件中存在的热桥和电阻,指出了改进的机会。最后,对现有设计提出了改进建议,以简化其制造工艺,提高其稳健性和效率,并方便其操作和维护。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Anales AFA
Anales AFA PHYSICS, MULTIDISCIPLINARY-
CiteScore
0.40
自引率
0.00%
发文量
43
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