Influence of Magnetron Sputtered TiN and VN Coatings on the Electrical Impedance of Aluminium Electrodes

Abstract

In this work, TiN and VN coatings were applied on aluminium electrodes by direct current (DC) magnetron sputtering in order to study the influence of the protective coatings on the electrical impedance of the substrate. The structure of the samples was studied using X-ray diffraction (XRD). The microhardness of the substrate and the coated samples was also determined. The electrical impedance of the substrates with and without coatings was also studied and the results were used for evaluation of the applicability of such coatings for interface electrodes for flexible electronics. Electric impedance spectroscopy in a wide frequency range was applied for interlayer and surface contact properties determination. Results showed improved stability and conductivity of the electrodes coated using the TiN and VN thin films, particularly in the low frequency range.