Snリフローを適用したドーム型金型の加工プロセス

Abstract

Recently, three-dimensional cell culture methods are focused on the fields of drug discovery and regenerative medicine. In the three-dimensional cell culture methods, cells are incubated to stereoscopic cellular structure (cellular spheroids) and metabolic organs, which are absorption tubes and excretory organs, are formed between cells. The metabolic organs are functional for drug metabolism in the tissue engineering. Conventional three-dimensional cell culture methods are used by nanoimprinted vessel, which are fabricated by a mold tool with Micro Electro Mechanical Systems (MEMS) processes, i. e. deposition, photolithography, and etching. Accordingly, the nanoimprinted vessels have very simple shapes, which are rectangular prism and cylinder. However, cells are not summarized in the center of the vessels, and the cellular spheroids are not efficiently incubated.This paper represents the fabricating method of dome-shaped vessels for efficient cell culture systems. In the three-dimensional cell culture, the dome-shaped vessels make it easy to collect the cells in the center of the vessels. However, the fabricating dome-shaped vessels are difficult to fabricate with only MEMS processes. To overcome this problem, the semiconductor post-process is applied to the fabricating process of dome-shaped vessels. The solder bump, which is connected between the semiconductor device and the external board, are easily formed to dome-shaped structure by reflow method. The dome-shaped mold tool, which solder bumps are plated on the substrate, is replicated to the resin.