MEMS and MOEMS Gyroscopes: A Review

IF 5 2区物理与天体物理 Q1 INSTRUMENTS & INSTRUMENTATION

Photonic Sensors Pub Date : 2023-10-09 DOI:10.1007/s13320-023-0693-x

Wenyi Huang, Xing Yan, Sengyu Zhang, Zhe Li, Jamal N. A. Hassan, Dingwei Chen, Guangjun Wen, Kai Chen, Guangwei Deng, Yongjun Huang

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引用次数: 0

Abstract

Abstract Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-mechanical system (MOEMS) are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies. According to the working principle and used materials, the newly-reported micro-gyroscopes in recent years include the silicon-based micromechanical vibratory gyroscope, hemispherical resonant gyroscope, piezoelectric vibratory gyroscope, suspended rotor gyroscope, microfluidic gyroscope, optical gyroscope, and atomic gyroscope. According to different sensitive structures, the silicon-based micromechanical vibratory gyroscope can also be divided into double frame type, tuning fork type, vibrating ring type, and nested ring type. For those micro-gyroscopes, in recent years, many emerging techniques are proposed and developed to enhance different aspects of performances, such as the sensitivity, angle random walk (ARW), bias instability (BI), and bandwidth. Therefore, this paper will firstly review the main performances and applications of those newly-developed MEMS/MOEMS gyroscopes, then comprehensively summarize and analyze the latest research progress of the micro-gyroscopes mentioned above, and finally discuss the future development trends of MEMS/MOEMS gyroscopes.

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MEMS和MOEMS陀螺仪:综述

采用微机电系统(MEMS)和微机电系统(MOEMS)的微陀螺仪是传统陀螺仪技术与MEMS/MOEMS技术相结合而发展起来的新一代陀螺仪。根据工作原理和使用材料的不同，近年来新报道的微陀螺仪有硅基微机械振动陀螺仪、半球形谐振陀螺仪、压电振动陀螺仪、悬浮转子陀螺仪、微流体陀螺仪、光学陀螺仪和原子陀螺仪等。硅基微机械振动陀螺仪根据敏感结构的不同，还可分为双框架型、音叉型、振动环型和嵌套环型。对于这些微陀螺仪，近年来提出并发展了许多新兴技术来提高其不同方面的性能，如灵敏度、角度随机游走(ARW)、偏置不稳定性(BI)和带宽。因此，本文将首先对最新开发的MEMS/MOEMS陀螺仪的主要性能和应用进行综述，然后对上述微陀螺仪的最新研究进展进行综合总结和分析，最后讨论MEMS/MOEMS陀螺仪的未来发展趋势。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Photonic Sensors Physics and Astronomy-Atomic and Molecular Physics, and Optics

CiteScore

8.60

自引率

2.30%

发文量

270

审稿时长

13 weeks

期刊介绍： Photonic Sensors publishes original, peer-reviewed articles that report on new developments of interest to both the photonics and sensor communities in all fields of photonic sensing science and technology. Topics include optical fiber sensors, planar waveguide sensors, laser-based sensors, and biophotonic sensors, etc. Photonic Sensors focuses on experimental contributions related to novel principles, structures or materials for photonic sensors. Papers that report on investigations based on combinations of experimental and analytical/numerical approaches are also welcome.