NON-DIMENSIONAL ANALYSIS OF FILM INSTABILITY POINTS OF LIQUID FILM DEVELOPING OVER A ROTATING DISK VIA HIGHLY RESOLVED SIMULATIONS

J. Won, T. Kim, J. Park, S. Kang
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Abstract

A liquid jet developing into a liquid film over a rotating disk is found in various industrial applications such as semiconductor manufacturing processes. The liquid film develops various instabilities such as the spiral wave and film break-up. This study performs a non-dimensional analysis on these film instability points. High-fidelity flow simulations are performed for a parametric study based on the rotation rate, flow rate, liquid viscosity, surface tension, and contact angle (CA). A non-dimensional model for the instability points is derived using the Buckingham‘s PI theorem. Parameter sensitivity analyses are performed using the simulation results for a reduced model. The spiral wave starting point is affected mainly by the Reynolds number and capillary number, but not by CA. Also, a reduced non-dimensional model using a single parameter can be derived by combining the non-dimensional parameters. On the break-up point, the surface tension and CA have primary effects, and the capillary number and CA are found to be the main non-dimensional parameters. Based on this finding, a reduced non-dimensional model that predicts the break-up point is derived.
通过高分辨率模拟对旋转盘上显影液膜失稳点的无量纲分析
在半导体制造过程等各种工业应用中,可以发现在旋转磁盘上发展成液体膜的液体射流。液膜产生了螺旋波和破膜等各种不稳定性。本研究对这些薄膜失稳点进行了无量纲分析。基于转速、流速、液体粘度、表面张力和接触角(CA)进行了高保真流动模拟参数研究。利用Buckingham 's PI定理导出了失稳点的无量纲模型。利用简化模型的仿真结果进行了参数敏感性分析。螺旋波的起始点主要受雷诺数和毛细数的影响,而不受CA的影响。此外,通过组合无量纲参数,可以得到单参数的简化无量纲模型。在破裂点上,表面张力和CA是主要的影响因素,毛细数和CA是主要的无因次参数。基于这一发现,推导出了一个预测破裂点的简化的无维模型。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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