The Laser Ion Implantation Facility LIIF: design and first results

Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505) Pub Date : 2000-09-10 DOI:10.1109/CLEOE.2000.910376

F. Boody, J. Kempf, R. Hopfl, H. Hora, L. Laska, L. Juha, K. Rohlena, J. Krása, M. Pfeifer, F. Woryna, J. Wołowski, V. Pefina

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Abstract

Summary form only given. The Laser Ion Implantation Facility has been designed to study the commercial feasibility of laser ion implantation using an industrial excimer laser. Design details and first results of characterizing the ion source and implanting ions are presented.

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激光离子注入装置LIIF:设计和初步结果

只提供摘要形式。激光离子注入装置的设计是为了研究使用工业准分子激光器进行激光离子注入的商业可行性。介绍了离子源和注入离子的设计细节和初步结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505)

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