Optical attachment for spatial transformation of excimer laser beam

SPIE LASE Pub Date : 2016-04-22 DOI:10.1117/12.2214706
A. Zhevlakov, A. Grishkanich, S. Kascheev, V. Kujanpää, T. Savinainen, E. Gavrilov
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引用次数: 2

Abstract

The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 х 20 mm and equal divergence of 5 х 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.
准分子激光束空间变换的光学附件
实验研究了光学附件对准分子激光空间特性的影响。尺寸为3 × 20mm,发散度为2 × 5mrad的矩形截面激光束经过光学附件后,得到了20 × 20mm的正方形和5 × 5mrad正交方向的等发散。结果表明,在材料微加工设施中应用该单元简化了照明模块的光路,允许在加工材料平面上以微米精度获得最佳辐照均匀性(在2%以内),并且由于抑制了“热”点的影响而减轻了光学元件的光束负载。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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